JPH0367064U - - Google Patents
Info
- Publication number
- JPH0367064U JPH0367064U JP12795789U JP12795789U JPH0367064U JP H0367064 U JPH0367064 U JP H0367064U JP 12795789 U JP12795789 U JP 12795789U JP 12795789 U JP12795789 U JP 12795789U JP H0367064 U JPH0367064 U JP H0367064U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- heater
- counter electrode
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12795789U JPH0367064U (en]) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12795789U JPH0367064U (en]) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367064U true JPH0367064U (en]) | 1991-06-28 |
Family
ID=31675691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12795789U Pending JPH0367064U (en]) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367064U (en]) |
-
1989
- 1989-10-31 JP JP12795789U patent/JPH0367064U/ja active Pending
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